The EXCITE is a single frequency all-solid-state laser system for applications in the UV such as wafer inspection, calibration of spectrometers and interferometric applications. The spectral bandwidth of less than 30 MHz is near its theoretical Fourier limit. The laser provides short temporal pulses in a diffraction-limited beam with M² < 1.6 at repetition rates between 1 and 30 kHz. The average output power is more than 150 mW at 266 nm, or 500 mW at 355 nm, with ultra-stable pulse traces and a long coherence length of more than 4 m in a rugged industrial design. APPLICATIONS EXCITE Series Wafer inspection Photoluminescence Interferometry Raman spectroscopy Holography Spectrometer calibration Metrology Direct interferometric lithography EXCITE 266 Wavelength 266 nm Spectral bandwidth < 60 MHz Coherence length > 2.5 m Average power > 150 mW Pulse duration 10-15 ns Energy per pulse > 12.5 µJ Repetition rate 1 – 30 kHz M² < 1.7 Pulse-to-pulse stab. σ < 1.5% EXCITE 355 Wavelength 355 nm Spectral bandwidth < 50 MHz Coherence length > 3 m Average power > 500 mW Pulse duration 14-18 ns Energy per pulse > 40 µJ Repetition rate 1 – 30 kHz M² < 1.3 Pulse-to-pulse stab. σ < 1.0% EXCITE 532 Wavelength 532 nm Average power 2.5 W Pulse duration 15-20 ns Energy per pulse 160 µJ Repetition rate 1 – 30 kHz M² < 1.2 Spectral bandwidth < 50 MHz Coherence length > 3 m Pulse-to-pulse stab. σ < 0.8 % EXCITE 1064 Wavelength 1064 nm Average power 6 W Pulse duration 20-30 ns Energy per pulse 400 µJ Repetition rate 1 – 30 kHz M² < 1.2 Spectral bandwidth < 30 MHz Coherence length > 5 m Pulse-to-pulse stab. σ < 0.3 % DOWNLOADS EXCITE Series EXCITE Datasheet
